Direction of travel |
XY axis two directions |
Table size |
40 mm x 40 mm |
Clamp method |
Clamp plate |
Mounting position |
Center |
Transfer mechanism |
MHS4-6.5FPA (Fine pitch micrometer head) |
Travel |
+/-3 mm |
Lead of actuator |
0.1 mm |
Scale interval |
Micrometer head 0.002 mm |
Minimum resolution |
0.001 mm |
Guiding method |
HG-VCR (V-groove and cross rollers) |
Travel accuracy HV |
Straightness (horizontal and vertical) 0.001mm |
Travel accuracy YP |
Yawing 15sec, Pitching 25sec |
Allowable moment |
Yawing 500 N・cm, Pitching 500 N・cm, Rolling 500 N・cm |
Moment rigidity |
Yawing rigidity 0.08 sec/N・cm, Pitching rigidity 0.06 sec/N・cm, Rolling rigidity 0.06 sec/N・cm |
Parallelism |
0.030 mm |
Parallelism of motion |
0.014 mm |
XY Perpendicularity |
0.010 mm |
Load capacity |
95.2 N (9.7 kgf) |
Weight |
0.4 kg |
Material / Surface treatment |
Stainless steel/Black chromium oxide |
Standard accessories |
Inspection certificate Mounting screw : Hexagon socket head cap screw M3, 4 screws |