| Direction of travel |
Z axis one direction |
| Table size |
40 mm x 40 mm |
| Clamp method |
Clamp plate |
| Transfer mechanism |
MHS4-6.5FPA (Fine pitch micrometer head) |
| Travel |
0 to 6 mm |
| Lead of actuator |
0.1 mm |
| Scale interval |
Micrometer head 0.002 mm |
| Minimum resolution |
0.001 mm |
| Guiding method |
HG-VCR (V-groove and cross rollers) |
| Travel accuracy |
Straightness (horizontal and vertical) 0.003 mm |
| Allowable moment |
Yawing 150 N・cm, Pitching 100 N・cm, Rolling 160 N・cm |
| Moment rigidity |
Yawing rigidity 1.5 sec/N・cm, Pitching rigidity 3.0 sec/N・cm, Rolling rigidity 0.7 sec/N・cm |
| Parallelism |
0.1 mm |
| Load capacity |
29.3 N (3 kgf) |
| Weight |
0.2 kg |
| Material / Surface treatment |
Stainless steel, Aluminum alloy (table base)/Black chromium oxide, Black Alumite |
| Standard accessories |
Inspection certificate
Mounting screw : Hexagon socket head cap screw M3, 4 screws |