By using the ceramic sintering method, there is no need to worry about dust generation from inside the porous ceramic, and it will not pollute the environment in which it is used.
Generates uniform suction force over the entire suction surface. Therefore, it is suitable for holding thin workpieces, films, and other workpieces that hole-punch vacuum chucks are not good at.
Even if a large surface plate is manufactured, porous ceramics has a lower specific gravity than aluminum (specific gravity: 1.6 to 1.8) and is lightweight, so it is useful for reducing the weight of equipment, etc.