| Direction of travel |
Z axis one direction |
| Table size |
70 mm x 70 mm |
| Clamp method |
Clamp plate |
| Transfer mechanism |
CMH-13RM (Standard micrometer head) |
| Travel |
0 to 10 mm |
| Lead of actuator |
0.5 mm |
| Scale interval |
Micrometer head 0.01 mm |
| Minimum resolution |
3 μm |
| Guiding method |
HG-VCR (V-groove and cross rollers) |
| Travel accuracy |
Straightness (horizontal and vertical) 5 μm |
| Allowable moment |
Yawing 150 N・cm, Pitching 100 N・cm, Rolling 160 N・cm |
| Moment rigidity |
Yawing rigidity 1.0 sec/N・cm, Pitching rigidity 2.5 sec/N・cm, Rolling rigidity 0.4 sec/N・cm |
| Parallelism |
0.1 mm |
| Load capacity |
29.3 N (3 kgf) |
| Weight |
0.4 kg |
| Material / Surface treatment |
Stainless steel, Aluminum alloy (table base)/Black chromium oxide, Black Alumite |
| Standard accessories |
Inspection certificate
Mounting screw : Hexagon socket head cap screw M4, 4 screws |