| Direction of travel |
XYZ, three axis and rotation |
| Table size |
φ90 mm |
| Clamp method |
XYZ axis clamp plate, rotary axis complex clamp |
| Mounting position |
XY axis reverse side |
| Transfer mechanism |
XY axis MHM1-15A, Z axis CMH-13FM, Rotary axis CEH-13R (each axis standard micrometer head) |
| Travel |
XY axis +/-7.5 mm, Z axis 0～10 mm, Rotary axis coarse 360°fine +/-5° |
| Lead of actuator |
XYZ axis 0.5 mm, Rotary axis approx. 0.50° |
| Scale interval |
XYZ axis Micrometer head0.01mm,rotaryaxis Vernier reading5′／Micrometer head0.01mm（1 division approx0.010°） |
| Minimum resolution |
XYZ axis 3 μm |
| Guiding method |
XY axis V-groove and cross rollers, Z axis HG-VCR (V-groove and cross rollers), Rotary axis sliding guide |
| Travel accuracy |
Straightness XY axis 3 μm, straightness Z axis 8 μm
Circularity 40 μm, deflection 20 μm |
| Load capacity |
29.4 N (3 kgf) |
| Weight |
1.75 kg |
| Material / Surface treatment |
Aluminum alloy/Black Alumite |
| Standard accessories |
Inspection certificate
Mounting screw : Hexagon socket head cap screw M4, 4 screws |