| Direction of travel |
XYZ, three axis and rotation |
| Table size |
φ125 mm |
| Clamp method |
XYZ axis clamp plate, rotary axis complex clamp |
| Mounting position |
XY axis reverse side |
| Transfer mechanism |
XY axis MHN1-25TA, Z axis CMH-13FM, Rotary axis CEH-13R (each axis standard micrometer head) |
| Travel |
XY axis +/-12.5 mm, Z axis 0～10 mm, Rotary axis coarse 360°fine +/-5° |
| Lead of actuator |
XYZ axis 0.5 mm, Rotary axis approx. 0.39° |
| Scale interval |
XYZ axis Micrometer head0.01mm,rotaryaxis Vernier reading5′／Micrometer head0.01mm（1 division approx0.008°） |
| Minimum resolution |
XYZ axis 3 μm |
| Guiding method |
XY axis V-groove and cross rollers, Z axis HG-VCR (V-groove and cross rollers), Rotary axis sliding guide |
| Travel accuracy |
Straightness XY axis 3 μm, straightness Z axis 5 μm
Circularity 50 μm, deflection 30 μm |
| Load capacity |
29.4 N (3 kgf) |
| Weight |
6.6 kg |
| Material / Surface treatment |
XY axis steel materials/Hard black chrome, Z axis/Rotary axis Aluminum alloy/Black Alumite |
| Standard accessories |
Inspection certificate
Mounting screw : Hexagon socket head cap screw M4, 4 screws |