●Compact unit model compatible with a microscope illuminator for system integration.
●The combination with a light illuminator enables both versatle observation and AF system.
●The compact unit design is optimized for mounting on microscopes and other instruments.


Customer voices
Wafer inspection equipment manufacturer E
This system facillitated a smooth transition to a high-performance visual inspection system, which was highly beneficial.
Research and development facility F
Adding the AF function to our microscope has made the analysis work much more enjoyable.


*AutoFocusSystem catalog (Published November 2024, English) is download from here. PDF download, approx. 9 megabytes. (Opens in a new window).

*Autofocus catalog (Published August 2020, old version, both English and Japanese) is download from here. PDF download, approx. 9 megabytes. (Opens in a new window).