● The motorized stages for microscope which Factory Automation application is strongly conscious of and which enables high-speed, quick stop, and short-time setting.
● If the operation of high-speed movement and quick stop repeatedly, setting is made with approximately 60 ms. Within the work pattern of 150 mm x 150 mm, approximately 10,000 inspection points can be scanned at high speed in approximately 17 minutes.
● It has the repeatability of +/- 0.002 mm to respond with the location reproduction within the field of view of high magnifying power microscope (approximately φ0.1 mm)
● Combined with the high-speed follow type auto focus microscope system manufactured by CHUO PRECISION INDUSTRIAL, it can make full use of its highest performance in the appearance inspection.
● This product has two types of strokes: 200 mm and 300 mm strokes.
● A set of the stage, driver, and cables are included in this product.