This is a motorized XY stage capable of high-speed, rapid stop, and short-time settling with a strong awareness of FA applications.
When moving at high speed and stopping rapidly, the work pattern is settled at about 60ms. For example, the entire inspection area of about 10,000 work patterns in the 150 mm×150 mm can be scanned in about 17 minutes.
The repeatability is ±2 μm, so the position reproducibility within the high-magnification microscopy field (approx. φ0.1mm) is also satisfactory.
By combining with the ultra-fast tracking autofocus microscope system, we can achieve the best performance in visual inspection and other areas.