The inspection items and precision standards contained within the catalog for our motorized stages have been well established. Comprehensive precision testing is conducted before shipment from the factory and we ensure that only the units that live up to our stringent standards are shipped.
In order to prevent the presence of human error (individual testing errors) in our precision testing, our testing system has been totally automated and test results kept for safekeeping.
By request, we are happy to provide a copy of the inspection sheet when the unit is shipped.
Measuring instruments used during our tests have full traceability with measurement standards and we are constantly working to carry out highly reliable precision management.

Measurements involving length such as positioning precision use an ultra-precise laser measurement system or digital measurement instrument with built-in glass scale.
The measurement of straightness (horizontal), straightness (vertical), yawing, and pitching can be performed by an ultra-precise laser measurement system, or our own “Straighter” straightness measuring instrument which is able to perform simultaneous measurement of all four of these displacements.
All measured data is stored separately for each unit’s product number.
By request, we are able to provide a copy of the inspection sheet when the unit is shipped.

■ Testing
X stage positioning precision is measured using an ultra-precise laser measurement system.
The ultra-precise laser measurement system is capable of sub-micron precise measurement such as for microscopic-feed positioning precision.
We also establish measurement traceability to ensure our precision is reliable. All measurements are conducted in a temperature and humidity controlled laboratory.
Our “QT-B series” controller drivers are used for X stage control. In order to avoid human error, this is performed automatically by our in-house developed testing program installed in the connecting PC.

Measurements involving length such as positioning precision use an digital measurement instrument with built-in glass scale. The measurement of straightness (horizontal), straightness (vertical), yawing, and pitching can be performed by our own “Straighter” straightness measuring instrument which is able to perform simultaneous measurement of all four of these displacements. All measured data is stored separately for each unit’s product number. By request, we are able to provide a copy of the inspection sheet when the unit is shipped.

■ Testing
By vertically orienting our “Straighter” straightness measuring instrument, it is possible to perform simultaneous measurement of all four Z stage movement orientations; straightness (horizontal, vertical), yawing, and pitching.
Simultaneous measurement of all four displacements allows considerably shorter setting up and measuring times.
Our “QT-B series” controller drivers are used for Z stage control. In order to avoid human error, this is performed automatically by our in-house developed testing program installed in the connecting PC.

Tilt stage measurement can be performed by either a theodolite, our “Laser Autocollimator LAC-SA”, or a photoelectric autocollimator and precision mirrors. All measured data is stored separately for each unit’s product number. By request, we are able to provide a copy of the inspection sheet when the unit is shipped.

■ Testing
Tilt stage repeatability is measured using our “Laser Autocollimator LAC-SA”.
The "Laser Autocollimator LAC-SA" uses a semiconductor laser light source which means that setting up is much easier thanks to the visible optical axis.
It also has a small beam width which allows the use of small-diameter measuring mirrors.
Our “QT-B series” controller drivers are used for tilt stage control. In order to avoid human error, this is performed automatically by our in-house developed testing program installed in the connecting PC.

Rotation stage measurement can be performed by either a photoelectric autocollimator, or our own “Laser Autocollimator” which works with a twelve-sided precision mirror to perform simultaneous measurement of both vertical angular displacement. All measured data is stored separately for each unit’s product number. By request, we are able to provide a copy of the inspection sheet when the unit is shipped.

■ Testing
Rotation stage positioning precision is measured using a photoelectric autocollimator and a twelve-sided precision mirror. Our “QT-B series” controller drivers are used for rotation stage control. In order to avoid human error, this is performed automatically by our in-house developed testing program installed in the connecting PC.
This same measurement can also be performed by the “Laser Autocollimator”.