The moment load that can be applied to when the stages are assembled or when components are attached to the stage is called “allowance moment.” There are several types of allowance moment depending on the moment load direction and the stage type.
In X, XY, and Z stages, there are three types, allowance moment (yaw), allowance moment (pitch), and allowance moment (roll). In rotation stage, there is an allowance moment, and in an oblique stage, there are two types, allowance moment (yaw) and allowance moment (roll).