In the XY axis stage, there are two types of stages. One is the superposition of X axis stages. Another one is the 3-stage structure with the X axis (lower axis) table and Y axis (upper axis) base as the integral structure for making the stage height low.
The stage, which the high-precision and high-rigidity HG-VCR method is applied, is structured with a good orthogonal precision with a superposition of X axis stages.
It is available to adjust the orthogonality to be highly precise by combining different type stages. Please contact us separately if such stage is necessary.